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Course Descriptions

The mechanical engineering curriculum is designed to prepare students for productive careers in industry, government, education and private consulting as well as for graduate study. Thus, it is based on the fundamental principles of science and engineering. These provide a strong foundation that enables students to apply what they have learned to the complex technological problems of today and to teach themselves the new technologies of tomorrow.

ME 516 - Introduction to MEMS: Fabrication & Applications

  • Credit Hours: 3R-3L-4C
  • Term Available: S
  • Graduate Studies Eligible: Yes
  • Prerequisites: Junior or Senior class standing
  • Corequisites: None

Properties of silicon wafers; wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever and pressure sensor. Cross-listed with EP 510, ECE 516, CHE 505, and BE 516.

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