EP 510 - Introduction to MEMS: Fabrication & Applications
- Credit Hours: 3R-3L-4C
- Term Available: S
- Graduate Studies Eligible: No
- Prerequisites: Junior or Senior standing
- Corequisites: None
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Students must do additional project work on a topic selected by the instructor. Cross-listed with BE 516, CHE 505, ECE 516, and ME 516.