NE 411 - Advanced topics in MEMS
- Credit Hours: 3R-3L-4C
- Term Available: F
- Graduate Studies Eligible: No
- Prerequisites: NE 410 or equivalent course
- Corequisites: None
Topics such as: Microlithography, design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Cross-listed with ECE 419, and CHE 419.